ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö...
Transcript of ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö...
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Ɇɨɫɤɨɜɫɤɢɣ ɝɨɫɭɞɚɪɫɬɜɟɧɧɵɣ ɭɧɢɜɟɪɫɢɬɟɬ ɢɦ. Ɇ.ȼ. Ʌɨɦɨɧɨɫɨɜɚ
ɇɚɭɱɧɨ-ɨɛɪɚɡɨɜɚɬɟɥɶɧɵɣ ɰɟɧɬɪ ɩɨ ɧɚɧɨɬɟɯɧɨɥɨɝɢɹɦ
ɦɟɠɮɚɤɭɥɶɬɟɬɫɤɢɣ ɤɭɪɫ ɥɟɤɰɢɣ
««ɎɭɧɞɚɦɟɧɬɚɥɶɧɵɟɎɭɧɞɚɦɟɧɬɚɥɶɧɵɟ ɨɫɧɨɜɵɨɫɧɨɜɵ ɧɚɧɨɬɟɯɧɨɥɨɝɢɣɧɚɧɨɬɟɯɧɨɥɨɝɢɣ»»
ɅɟɤɰɢɹɅɟɤɰɢɹ 11: 11: Ɏɢɡɢɤɚ ɧɚɧɨ-ɭɫɬɪɨɣɫɬɜ. Ʌɢɬɨɝɪɚɮɢɱɟɫɤɢɟ ɦɟɬɨɞɵɫɨɡɞɚɧɢɹ ɦɢɤɪɨ- ɧɚɧɨ-ɭɫɬɪɨɣɫɬɜ. Ɇɢɤɪɨ- ɢ ɧɚɧɨ-ɬɪɚɧɡɢɫɬɨɪɵ. ɁɚɤɨɧɆɭɪɚ. Ɇɟɯɚɧɢɱɟɫɤɢɟ ɢ ɷɥɟɤɬɪɨɦɟɯɚɧɢɱɟɫɤɢɟ ɦɢɤɪɨ- ɢ ɧɚɧɨ-ɭɫɬɪɨɣɫɬɜɚ. ɇɚɧɨ-ɭɫɬɪɨɣɫɬɜɚ ɧɚ ɨɫɧɨɜɟ ɭɝɥɟɪɨɞɧɵɯ ɧɚɧɨɬɪɭɛɨɤ.
ɈɛɪɚɡɰɨɜɈɛɪɚɡɰɨɜ ȺɥɟɤɫɚɧɞɪȺɥɟɤɫɚɧɞɪ ɇɢɤɨɥɚɟɜɢɱɇɢɤɨɥɚɟɜɢɱ
ɩɪɨɮɟɫɫɨɪ, Ɏɢɡɢɱɟɫɤɢɣ ɮɚɤɭɥɶɬɟɬ ɆȽɍ
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ɇɚɧɨɦɚɬɟɪɢɚɥɵ ɇɚɧɨɬɟɯɧɨɥɨɝɢɢ
ɇɚɧɨɭɫɬɪɨɣɫɬɜɚ
ɐɟɥɶɸ ɫɨɡɞɚɧɢɹ ɧɚɧɨɦɚɬɟɪɢɚɥɨɜ ɢ ɧɚɧɨɬɟɯɧɨɥɨɝɢɣ ɹɜɥɹɟɬɫɹ ɢɡɝɨɬɨɜɥɟɧɢɟɭɫɬɪɨɣɫɬɜ, ɨɛɥɚɞɚɸɳɢɯ ɭɥɭɱɲɟɧɧɵɦɢ ɢɥɢ ɧɨɜɵɦɢ ɮɭɧɤɰɢɨɧɚɥɶɧɵɦɢɜɨɡɦɨɠɧɨɫɬɹɦɢ.
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ɍɋɌɊɈɃɋɌȼɈ: Ɍɟɯɧɢɱɟɫɤɨɟ ɫɨɨɪɭɠɟɧɢɟ, ɦɟɯɚɧɢɡɦ, ɦɚɲɢɧɚ, ɩɪɢɛɨɪ.
Ɍɨɥɤɨɜɵɣ ɫɥɨɜɚɪɶ ɪɭɫɫɤɨɝɨ ɹɡɵɤɚ Ɉɠɟɝɨɜɚ:
ɋɂɋɌȿɆȺ: Ɏɨɪɦɚ ɨɪɝɚɧɢɡɚɰɢɢ ɱɟɝɨ-ɥɢɛɨ. ɇɟɱɬɨ ɰɟɥɨɟ, ɩɪɟɞɫɬɚɜɥɹɸɳɟɟɫɨɛɨɣ ɟɞɢɧɫɬɜɨ ɡɚɤɨɧɨɦɟɪɧɨ ɪɚɫɩɨɥɨɠɟɧɧɵɯ ɢ ɧɚɯɨɞɹɳɢɯɫɹ ɜɨ ɜɡɚɢɦɧɨɣɫɜɹɡɢ ɱɚɫɬɟɣ. Ɍɟɯɧɢɱɟɫɤɨɟ ɭɫɬɪɨɣɫɬɜɨ, ɤɨɧɫɬɪɭɤɰɢɹ.
ɇȺɇɈɍɋɌɊɈɃɋɌȼȺ ɢ ɇȺɇɈɋɂɋɌȿɆɕ ɩɪɟɞɫɬɚɜɥɹɸɬ ɫɨɛɨɣ ɦɟɯɚɧɢɡɦɵ, ɩɪɢɛɨɪɵ, ɦɚɲɢɧɵ, ɮɭɧɤɰɢɨɧɢɪɨɜɚɧɢɟ ɤɨɬɨɪɵɯ ɨɛɭɫɥɨɜɥɟɧɨ ɬɟɦ, ɱɬɨ ɨɧɢɜɵɩɨɥɧɟɧɵ ɫ ɢɫɩɨɥɶɡɨɜɚɧɢɟɦ ɧɚɧɨɦɚɬɟɪɢɚɥɨɜ ɢ/ɢɥɢ ɧɚɧɨɬɟɯɧɨɥɨɝɢɣ, ɜɤɥɸɱɚɹ ɜɨɡɦɨɠɧɨɫɬɶ ɩɟɪɟɦɟɳɟɧɢɹ ɢɯ ɱɚɫɬɟɣ ɢ/ɢɥɢ ɧɚɥɢɱɢɟ ɪɚɡɦɟɪɨɜɫɨɫɬɚɜɥɹɸɳɢɯ ɢɯ ɱɚɫɬɟɣ ɜ ɧɚɧɨɦɟɬɪɨɜɨɦ ɞɢɚɩɚɡɨɧɟ.
ɐɟɥɹɦɢ ɫɨɡɞɚɧɢɹ ɧɚɧɨɭɫɬɪɨɣɫɬɜ ɢ ɧɚɧɨɫɢɫɬɟɦ ɹɜɥɹɸɬɫɹ ɢɫɩɨɥɶɡɨɜɚɧɢɟɧɨɜɵɯ ɮɢɡɢɱɟɫɤɢɯ ɩɪɢɧɰɢɩɨɜ ɜ ɢɯ ɮɭɧɤɰɢɨɧɢɪɨɜɚɧɢɢ, ɚ ɬɚɤɠɟɦɢɧɢɚɬɸɪɢɡɚɰɢɹ ɪɚɡɦɟɪɨɜ.
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Ɂɚɤɨɧ Ɇɭɪɚ (Gordon Moore, 1965): ɧɚɢɛɨɥɟɟ ɜɵɝɨɞɧɨɟ ɱɢɫɥɨ ɬɪɚɧɡɢɫɬɨɪɨɜ ɧɚɨɞɧɨɦ ɤɪɢɫɬɚɥɥɟ ɭɞɜɚɢɜɚɟɬɫɹ ɤɚɠɞɵɣ ɝɨɞ.
[http://www.intel.com/technology/mooreslaw/]
1947 ɝ. – ɢɡɨɛɪɟɬɟɧɢɟ ɩɟɪɜɨɝɨ ɬɪɚɧɡɢɫɬɨɪɚ ɍ. ɒɨɤɥɢ, Ⱦɠ. Ȼɚɪɞɢɧ, ɍ. Ȼɪɚɬɬɟɣɧ.
ɋɨɜɪɟɦɟɧɧɵɟ ɦɢɤɪɨɫɯɟɦɵ ɫɨɞɟɪɠɚɬɦɢɥɥɢɨɧɵ ɬɪɚɧɡɢɫɬɨɪɨɜ.
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Ɇɢɤɪɨɷɥɟɤɬɪɨɧɧɚɹ ɬɟɯɧɨɥɨɝɢɹ
1-2: ɢɡɝɨɬɨɜɥɟɧɢɟ ɩɥɚɫɬɢɧ ɢɡ ɦɨɧɨɤɪɢɫɬɚɥɥɢɱɟɫɤɨɝɨ ɤɪɟɦɧɢɹ;
3: ɧɚɧɟɫɟɧɢɟ ɮɨɬɨɪɟɡɢɫɬɚ;
4: ɮɨɬɨɥɢɬɨɝɪɚɮɢɹ;
5-8: ɥɟɝɢɪɨɜɚɧɢɟ, ɨɤɢɫɥɟɧɢɟ, ɦɟɬɚɥɥɢɡɚɰɢɹ;
9: ɬɟɫɬɢɪɨɜɚɧɢɟ, ɪɚɡɪɟɡɚɧɢɟ ɩɥɚɫɬɢɧɵ ɧɚ ɨɬɞɟɥɶɧɵɟ ɷɥɟɦɟɧɬɵ.
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Ʌɢɬɨɝɪɚɮɢɱɟɫɤɢɟ ɦɟɬɨɞɵ ɮɨɪɦɢɪɨɜɚɧɢɹɩɥɚɧɚɪɧɵɯ ɫɬɪɭɤɬɭɪ
ɉɪɨɹɜɥɟɧɢɟɉɨɡɢɬɢɜɧɨɟ ɇɟɝɚɬɢɜɧɨɟ
Ɍɪɚɜɥɟɧɢɟ ɢ ɨɱɢɫɬɤɚ
ɉɨɥɢɦɟɪɧɵɣ ɪɟɡɢɫɬ
Ɍɨɧɤɚɹ ɩɥɟɧɤɚ
ɉɨɞɥɨɠɤɚ
Ɋɟɡɢɫɬ Ɋɟɡɢɫɬ
ɂɡɥɭɱɟɧɢɟ
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Ⱦɨɡɚ ɨɛɥɭɱɟɧɢɹ (Lɨg)
Ɍɨɥɳɢɧɚɪɟɡɢɫɬɚɩɨɫɥɟ
ɩɪɨɰɟɞɭɪɵɩɪɨɹɜɥɟɧɢɹ
ɮɨɬɨ-ɢɡɨɛɪɚɠɟɧɢɹ
0
1
D0 –ɩɨɪɨɝɨɜɚɹ ɞɨɡɚ
DC – ɞɨɡɚɩɨɥɧɨɝɨɭɞɚɥɟɧɢɹɪɟɡɢɫɬɚ
⎥⎦
⎤⎢⎣
⎡=
CD
DLog 0
10γ
Ʉɪɢɬɢɱɟɫɤɢ ɜɚɠɧɵɦ ɩɚɪɚɦɟɬɪɨɦ ɥɢɬɨɝɪɚɮɢɱɟɫɤɨɝɨ ɩɪɨɰɟɫɫɚ ɹɜɥɹɟɬɫɹ ɤɨɧɬɪɚɫɬɢɡɨɛɪɚɠɟɧɢɹ, ɨɛɟɫɩɟɱɢɜɚɟɦɵɣ ɫɜɨɣɫɬɜɚɦɢ ɪɟɡɢɫɬɚ. Ⱦɥɹ ɭɜɟɥɢɱɟɧɢɹ ɤɨɧɬɪɚɫɬɚɱɭɜɫɬɜɢɬɟɥɶɧɨɫɬɶ ɪɟɡɢɫɬɚ ɤ ɜɨɡɞɟɣɫɬɜɢɸ ɢɫɩɨɥɶɡɭɟɦɨɝɨ ɢɡɥɭɱɟɧɢɹ ɞɨɥɠɧɚ ɛɵɬɶɫɢɥɶɧɨ ɧɟɥɢɧɟɣɧɨɣ - ɫɥɚɛɚɹ ɱɭɜɫɬɜɢɬɟɥɶɧɨɫɬɶ ɤ ɦɚɥɵɦ ɞɨɡɚɦ ɢ ɫɢɥɶɧɚɹ ɤɛɨɥɶɲɢɦ.
Ɍɢɩɢɱɧɵɟ ɡɧɚɱɟɧɢɹɤɨɧɬɪɚɫɬɚ ɜɚɪɶɢɪɭɸɬɫɹɨɬ γ=2 ɞɥɹ PMMA
(ɩɨɥɢɦɟɬɢɥɦɟɬɚɤɪɢɥɚɬ) ɞɨ γ=15 ɞɥɹ ɫɨɜɪɟɦɟɧɧɵɯɍɎ ɮɨɬɨɪɟɡɢɫɬɨɜ UV-6 (Shipley UV series).
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ɂɫɬɨɱɧɢɤ ɫɜɟɬɚ
Ʉɨɧɞɟɧɫɨɪ
Ɏɨɬɨ-ɲɚɛɥɨɧ Cr (ɢɥɢ MoSi2) ɧɚɫɬɟɤɥɟ
Ɉɩɬɢɱɟɫɤɚɹ ɫɢɫɬɟɦɚ, ɫɨɡɞɚɸɳɚɹɭɦɟɧɶɲɟɧɧɨɟ ɢɡɨɛɪɚɠɟɧɢɟ
ɂɡɨɛɪɚɠɟɧɢɟ ɧɚɩɨɜɟɪɯɧɨɫɬɢ ɪɟɡɢɫɬɚ ,
ɧɚɧɟɫɟɧɧɨɝɨ ɧɚ ɩ.ɩ.
ɩɥɚɫɬɢɧɭ.
ɋɯɟɦɚ ɮɨɬɨɥɢɬɨɝɪɚɮɢɱɟɫɤɨɝɨ ɩɪɨɰɟɫɫɚ.
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ɉɪɟɞɟɥ ɪɚɡɪɟɲɟɧɢɹ ɨɩɬɢɱɟɫɤɨɣ ɥɢɬɨɝɪɚɮɢɢ
Ⱦɢɮɪɚɤɰɢɨɧɧɨɟ ɪɚɡɦɵɬɢɟ ɨɝɪɚɧɢɱɢɜɚɟɬ ɪɚɡɪɟɲɟɧɢɟ ɩɪɨɟɤɰɢɨɧɧɨɣ ɥɢɬɨɝɪɚɮɢɢ.
– ɤɪɢɬɟɪɢɣ ɪɚɡɪɟɲɟɧɢɹ Ɋɷɥɟɹ (λ - ɞɥɢɧɚ ɜɨɥɧɵ ɫɜɟɬɚ)
d
f
D
Ɋɚɡɪɟɲɟɧɢɟ ɨɩɬɢɱɟɫɤɨɣ ɫɢɫɬɟɦɵ, ɝɞɟ
α - ɭɝɨɥ ɫɯɨɞɢɦɨɫɬɢ ɥɭɱɟɣ (sinα= d/2f); NA= sinα – ɱɢɫɥɨɜɚɹ ɚɩɟɪɬɭɪɚ ɥɢɧɡɵ
Ʉɨɷɮɮɢɰɢɟɧɬ 1,22 ɜ ɤɪɢɬɟɪɢɢ Ɋɷɥɟɹ ɹɜɥɹɟɬɫɹ ɫɥɟɞɫɬɜɢɟɦ ɜɨɫɩɪɢɹɬɢɹ(ɱɭɜɫɬɜɢɬɟɥɶɧɨɫɬɢ) ɡɪɟɧɢɹ ɱɟɥɨɜɟɤɚ. ɉɨɫɤɨɥɶɤɭ ɱɭɜɫɬɜɢɬɟɥɶɧɨɫɬɶɮɨɬɨɪɟɡɢɫɬɚ ɨɬɥɢɱɚɟɬɫɹ ɨɬ ɱɭɜɫɬɜɢɬɟɥɶɧɨɫɬɢ ɝɥɚɡɚ, ɬɨ ɜɦɟɫɬɨ 1,22 ɞɨɥɠɟɧ ɢɫɩɨɥɶɡɨɜɚɬɶɫɹ ɞɪɭɝɨɣ ɤɨɷɮɮɢɰɢɟɧɬ – R=k1 λ/NA. Ɉɛɵɱɧɨ k1~0,8.
Ɍ.ɨ. ɪɚɡɪɟɲɟɧɢɟ (ɢɥɢ ɦɢɧɢɦɚɥɶɧɵɣ ɪɚɡɦɟɪ ɧɚ ɮɨɬɨɲɚɛɥɨɧɟ) ~ λ.
d
fD λ22,1=
NAf
f
d
fDR
λα
λλ 61,0sin2
22,122,1 ===≡
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Ⱦɥɹ ɭɜɟɥɢɱɟɧɢɹ ɪɚɡɪɟɲɟɧɢɹ (ɬ.ɟ. ɭɦɟɧɶɲɟɧɢɹ ɜɟɥɢɱɢɧɵ R) ɦɨɠɧɨɢɫɩɨɥɶɡɨɜɚɬɶ:
- ɍɦɟɧɶɲɟɧɢɟ ɞɥɢɧɵ ɜɨɥɧɵ ɫɜɟɬɚ (λ)
- ɍɜɟɥɢɱɟɧɢɟ ɚɩɟɪɬɭɪɵ (ɪɚɡɦɟɪɚ) ɨɩɬɢɱɟɫɤɢɯ ɷɥɟɦɟɧɬɨɜ (NA)
- ɂɡɦɟɧɟɧɢɟ ɯɚɪɚɤɬɟɪɢɫɬɢɤ ɮɨɬɨɪɟɡɢɫɬɚ (k1)
Ɍɪɚɞɢɰɢɨɧɧɚɹ ɥɢɬɨɝɪɚɮɢɹ ɢɫɩɨɥɶɡɭɟɬ:
- ɪɬɭɬɧɵɟ ɥɚɦɩɵ: λ1 = 435 ɧɦ (G-ɥɢɧɢɹ) ɢ λ2 = 365 ɧɦ (I-ɥɢɧɢɹ);
- ɷɤɫɢɦɟɪɧɵɟ ɥɚɡɟɪɵ: KrF – 248 ɧɦ; ArF – 193 ɧɦ; F2 – 157 ɧɦ.
Ɇɚɬɟɪɢɚɥɵ ɞɥɹ ɢɡɝɨɬɨɜɥɟɧɢɹ ɨɩɬɢɱɟɫɤɢɯ ɷɥɟɦɟɧɬɨɜ:
- ɨɛɵɱɧɵɣ ɤɜɚɪɰ (SiO2) ɢɫɩɨɥɶɡɭɟɬɫɹ ɬɨɥɶɤɨ ɞɥɹ ɞɥɢɧ ɜɨɥɧ ɛɨɥɟɟ 248 ɧɦ;
- ɞɥɹ 193 ɧɦ – ɩɥɚɜɥɟɧɵɣ ɤɜɚɪɰ ɢ CaF2; 157 ɧɦ - CaF2 ɢɥɢ MgF.
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Ʉɪɨɦɟ ɪɚɡɪɟɲɟɧɢɹ ɜ ɩɥɨɫɤɨɫɬɢ ɜɚɠɧɨɟ ɡɧɚɱɟɧɢɟ ɢɦɟɟɬ ɬɚɤɠɟ ɪɚɡɪɟɲɟɧɢɟ«ɩɨ ɝɥɭɛɢɧɟ», ɤɨɬɨɪɨɟ ɨɩɪɟɞɟɥɹɟɬɫɹ ɝɥɭɛɢɧɨɣ ɮɨɤɭɫɚ.
ɍɦɟɧɶɲɟɧɢɟ ɞɥɢɧɵ ɜɨɥɧɵ ɢ ɭɜɟɥɢɱɟɧɢɟ ɚɩɟɪɬɭɪɵ ɜɟɞɟɬ ɤ ɭɦɟɧɶɲɟɧɢɸɝɥɭɛɢɧɵ ɮɨɤɭɫɚ ɨɩɬɢɱɟɫɤɨɣ ɫɢɫɬɟɦɵ (DOF):
Ɍɟɯɧɨɥɨɝɢɹ ɭɪɨɜɧɹ 1997 ɝ.: λ=248 ɧɦ; NA=0,6 => DOF~300ɧɦ
Ɍ.ɨ. ɩɥɚɧɚɪɧɨɫɬɶ (ɩɥɨɫɤɨɫɬɧɨɫɬɶ) ɩ.ɩ. ɩɥɚɫɬɢɧ ɞɨɥɠɧɚ ɛɵɬɶ ɥɭɱɲɟ 300 ɧɦɧɚ ɪɚɡɦɟɪɟ, ɨɛɥɭɱɚɟɦɨɦ ɱɟɪɟɡ ɮɨɬɨɲɚɛɥɨɧ (~25×25 ɦɦ). ɗɬɨ ɨɱɟɧɶɬɪɭɞɧɚɹ ɡɚɞɚɱɚ.
ɇɟɤɨɬɨɪɨɟ ɭɥɭɱɲɟɧɢɟ ɪɚɡɪɟɲɟɧɢɹ ɜɨɡɦɨɠɧɨ ɡɚ ɫɱɟɬ ɨɩɬɢɦɢɡɚɰɢɢ ɫɜɨɣɫɬɜɦɚɬɟɪɢɚɥɚ ɮɨɬɨɪɟɡɢɫɬɚ, ɬ.ɟ. ɩɚɪɚɦɟɬɪɨɜ k1 ɢ k2.
Ɍɚɤɠɟ ɭɥɭɱɲɟɧɢɟ ɪɚɡɪɟɲɟɧɢɹ ɞɨɫɬɢɝɚɟɬɫɹ ɡɚ ɫɱɟɬ ɢɫɩɨɥɶɡɨɜɚɧɢɹɲɚɛɥɨɧɨɜ, ɨɛɟɫɩɟɱɢɜɚɸɳɢɯ ɚɦɩɥɢɬɭɞɧɭɸ ɢ ɮɚɡɨɜɭɸ ɤɨɪɪɟɤɰɢɸɢɡɨɛɪɚɠɟɧɢɹ.
Ɉɞɧɢɦ ɢɡ ɦɟɬɨɞɨɜ, ɩɨɡɜɨɥɹɸɳɢɯ ɞɨɫɬɢɱɶ ɫɭɳɟɫɬɜɟɧɧɨɝɨ ɭɥɭɱɲɟɧɢɹɪɚɡɪɟɲɟɧɢɹ, ɹɜɥɹɟɬɫɹ ɫɨɜɦɟɫɬɧɨɟ ɢɫɩɨɥɶɡɨɜɚɧɢɟ 2-ɯ ɢ ɛɨɥɟɟ ɲɚɛɥɨɧɨɜ, ɢɡɝɨɬɨɜɥɟɧɧɵɯ ɞɥɹ ɪɚɛɨɬɵ ɧɚ ɪɚɡɧɵɯ ɮɢɡɢɱɟɫɤɢɯ ɩɪɢɧɰɢɩɚɯ.
222 )()(5,0
NAk
NADOF
λλ±=±=
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ɂɫɯɨɞɧɨɟɢɡɨɛɪɚɠɟɧɢɟɮɨɪɦɢɪɭɟɦɨɣɫɬɪɭɤɬɭɪɵ
ɒɚɛɥɨɧ Ɉɛɵɱɧɵɣ Ɋɟɡɭɥɶɬɢɪɭɸɳɟɟɫ ɮɚɡɨɜɵɦ ɮɨɬɨ-ɲɚɛɥɨɧ ɢɡɨɛɪɚɠɟɧɢɟɫɞɜɢɝɨɦ (ɚɦɩɥɢɬɭɞɧɵɣ)
ɋɯɟɦɚ ɢɫɩɨɥɶɡɨɜɚɧɢɹ ɞɜɭɯ ɲɚɛɥɨɧɨɜ ɞɥɹ ɫɨɡɞɚɧɢɹ ɢɡɨɛɪɚɠɟɧɢɣ ɫ ɜɵɫɨɤɢɦɪɚɡɪɟɲɟɧɢɟɦ.
ɊɗɆ ɢɡɨɛɪɚɠɟɧɢɟ ɫɬɪɭɤɬɭɪ, ɫɮɨɪɦɢɪɨɜɚɧɧɵɯ ɫ ɩɨɦɨɳɶɸɮɨɬɨɥɢɬɨɝɪɚɮɢɢ ɧɚ ɨɫɧɨɜɟ248 ɧɦ ɍɎ ɢɡɥɭɱɟɧɢɹ ɢɢɦɟɸɳɢɯ ɦɢɧɢɦɚɥɶɧɵɟɩɨɩɟɪɟɱɧɵɟ ɪɚɡɦɟɪɵɷɥɟɦɟɧɬɨɜ 140 ɧɦ.
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ɗɤɫɬɪɟɦɚɥɶɧɚɹ ɍɎ ɥɢɬɨɝɪɚɮɢɹ (ɗɍɎɅ)
Ɉɞɧɚɤɨ: ɨɩɬɢɱɟɫɤɢɟ ɷɥɟɦɟɧɬɵ ɞɨɥɠɧɵ ɛɵɬɶ ɢɡɝɨɬɨɜɥɟɧɵ ɢɡ ɩɨɞɯɨɞɹɳɢɯ ɦɚɬɟɪɢɚɥɨɜ; ɧɚɩɪɢɦɟɪ, ɱɟɪɟɞɭɸɳɢɟɫɹ ɫɥɨɢ ɤɪɟɦɧɢɹ ɢ ɦɨɥɢɛɞɟɧɚ ɫ ɩɟɪɢɨɞɨɦ 6,5 ɧɦ.
Ʉɨɪɨɬɤɨɜɨɥɧɨɜɨɟ ɢɡɥɭɱɟɧɢɟ ɩɨɡɜɨɥɹɟɬ ɫɭɳɟɫɬɜɟɧɧɨ ɭɥɭɱɲɢɬɶ ɪɚɡɪɟɲɟɧɢɟɞɚɠɟ ɩɪɢ ɢɫɩɨɥɶɡɨɜɚɧɢɢ ɨɩɬɢɱɟɫɤɢɯ ɷɥɟɦɟɧɬɨɜ ɫ ɦɚɥɟɧɶɤɨɣ ɚɩɟɪɬɭɪɨɣ:
λ= 14 ɧɦ; NA=0,1 => R=100
Ɉɞɧɨɜɪɟɦɟɧɧɨ ɭɜɟɥɢɱɢɜɚɟɬɫɹ ɝɥɭɛɢɧɚ ɮɨɤɭɫɚ
DOF=1 ɦɤɦ (ɞɥɹ k1=0,7)
1013ɗɍɎɅ2015-2020
25630-4013ɗɍɎɅ2013
647013ɗɍɎɅ2010
157ɗɍɎɅ
1610013Ʌɚɡɟɪ F22007
4130-100193Ʌɚɡɟɪ ArF; ɗɍɎɅ(ɩɥɚɡɦɚ, ɫɢɧɯɪɨɬɪɨɧ)
2004
193Ʌɚɡɟɪ ArF
1180-130248Ʌɚɡɟɪ KrF2001-2002
ȿɦɤɨɫɬɶ ɩɚɦɹɬɢ, ȽɛɢɬɊɚɡɦɟɪɵ ɷɥɟɦɟɧɬɨɜȾɥɢɧɚ ɜɨɥɧɵɂɫɬɨɱɧɢɤ ɢɡɥɭɱɟɧɢɹȽɨɞɵ
ɉɪɨɝɧɨɡ ɪɚɡɜɢɬɢɹ ɬɟɯɧɨɥɨɝɢɢ ɮɨɬɨɥɢɬɨɝɪɚɮɢɢ
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ɗɍɎ ɥɢɬɨɝɪɚɮ ɧɚ ɨɫɧɨɜɟ ɫɢɧɯɪɨɬɪɨɧɚ
![Page 15: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/15.jpg)
ɗɥɟɤɬɪɨɧɧɨ-ɥɭɱɟɜɚɹ ɥɢɬɨɝɪɚɮɢɹ (ɩɪɹɦɨɟ ɪɢɫɨɜɚɧɢɟ – direct writing)
1974 1978 1990
Ƚɚɭɫɫɨɜɚ ɮɨɪɦɚ ɩɭɱɤɚ ɉɪɹɦɨɭɝɨɥɶɧɵɣ ɩɭɱɨɤ ɋɟɝɦɟɧɬɧɨɟ ɨɛɥɭɱɟɧɢɟ
ɍɜɟɥɢɱɟɧɢɟ ɩɪɨɢɡɜɨɞɢɬɟɥɶɧɨɫɬɢ
ɊɗɆ
Ɉɝɪɚɧɢɱɟɧɧɵɣ ɪɚɡɦɟɪ ɨɛɥɚɫɬɢ, ɜ ɤɨɬɨɪɨɣ ɨɬɫɭɬɫɬɜɭɸɬ ɚɛɟɪɪɚɰɢɢ ɢ ɞɪ. ɢɫɤɚɠɟɧɢɹ ɜɟɞɟɬɤ ɧɟɨɛɯɨɞɢɦɨɫɬɢ ɫɨɜɦɟɫɬɧɨɝɨ ɢɫɩɨɥɶɡɨɜɚɧɢɹ ɫɦɟɳɟɧɢɹ ɩɭɱɤɚ ɢ ɦɟɯ. ɫɦɟɳɟɧɢɹ ɩɨɞɥɨɠɤɢ
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Ʌɢɬɨɝɪɚɮɢɹ ɫ ɩɨɦɨɳɶɸ ɫɮɨɤɭɫɢɪɨɜɚɧɧɨɝɨ ɩɭɱɤɚ ɢɨɧɨɜ (FIB)
ɋɯɟɦɚ FIB ɭɫɬɚɧɨɜɤɢ:
- LMIS – ɢɫɬɨɱɧɢɤ ɠɢɞɤɨɝɨ ɦɟɬɚɥɥɚ (Ga)
- ɋɤɨɪɨɫɬɶ ɢɨɧɨɜ 106 ɦ/ɫ
- ɂɨɧɧɵɣ ɬɨɤ 10 Ⱥ/ɫɦ2
- Ɋɚɡɦɟɪ ɩɭɱɤɚ 5-10 ɧɦ
ɉɪɢɦɟɪ FIBɢɡɨɛɪɚɠɟɧɢɹɧɚ PMMA
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Ɍɟɯɧɨɥɨɝɢɹ ɧɚɧɨɩɟɱɚɬɢ
(1) Ɇɚɬɪɢɰɚ ɢɡɝɨɬɚɜɥɢɜɚɟɬɫɹɧɚɩɪɢɦɟɪ ɫ ɩɨɦɨɳɶɸɷɥɟɤɬɪɨɧɧɨɣ ɥɢɬɨɝɪɚɮɢɢ
(2) ɋɥɨɣ ɩɨɥɢɦɟɪɚɞɟɮɨɪɦɢɪɭɟɬɫɹ ɫ ɩɨɦɨɳɶɸɦɚɬɪɢɰɵ
(3) Ɂɚɬɜɟɪɞɟɜɚɧɢɟ ɩɨɥɢɦɟɪɚɩɪɨɢɫɯɨɞɢɬ ɩɪɢ ɨɯɥɚɠɞɟɧɢɢɧɢɠɟ ɬɟɦɩɟɪɚɬɭɪɵɫɬɟɤɥɨɜɚɧɢɹ ɢɥɢ ɩɨɞɞɟɣɫɬɜɢɟɦ ɍɎ
(4) ɋ ɩɨɦɨɳɶɸ ɚɧɢɡɨɬɪɨɩɧɨɝɨɬɪɚɜɥɟɧɢɹ ɞɟɮɨɪɦɢɪɨɜɚɧɧɚɹɱɚɫɬɶ ɩɨɥɢɦɟɪɚ ɭɞɚɥɹɟɬɫɹ
Ɋɚɡɪɟɲɟɧɢɟ – ɞɨ 10 ɧɦ!
ɦɚɬɪɢɰɚ
ɪɟɡɢɫɬɩɨɞɥɨɠɤɚ
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Ɍɪɚɧɡɢɫɬɨɪ – ɨɫɧɨɜɧɨɟ ɭɫɬɪɨɣɫɬɜɨ ɷɥɟɤɬɪɨɧɧɨɣ ɬɟɯɧɢɤɢ
Ȼɢɩɨɥɹɪɧɵɣ ɬɪɚɧɡɢɫɬɨɪ n-p-n ɫɨɫɬɨɢɬ ɢɡ ɬɪɟɯ ɪɚɡɧɨɬɢɩɧɨɥɟɝɢɪɨɜɚɧɧɵɯ ɩɨɥɭɩɪɨɜɨɞɧɢɤɨɜ ɢ ɦɟɬɚɥɥɢɱɟɫɤɢɯ ɤɨɧɬɚɤɬɨɜ ɤ ɧɢɦ (n — ɨɛɥɚɫɬɶ ɩɨɥɭɩɪɨɜɨɞɧɢɤɚ n-ɬɢɩɚ, p — ɨɛɥɚɫɬɶ ɩɨɥɭɩɪɨɜɨɞɧɢɤɚ p-ɬɢɩɚ, Ȼ - ɛɚɡɚ, ɗ - ɷɦɢɬɬɟɪ, Ʉ – ɤɨɥɥɟɤɬɨɪ).
ɉɪɢɧɰɢɩ ɞɟɣɫɬɜɢɹ: ɬɨɤ ɗɦɢɬɬɟɪ-Ʉɨɥɥɟɤɬɨɪ ɡɚɜɢɫɢɬ ɨɬ ɬɨɤɚɄɨɥɥɟɤɬɨɪ-Ȼɚɡɚ. ɍɜɟɥɢɱɟɧɢɟ ɬɨɤɚ Ȼɚɡɵ ɩɪɢɜɨɞɢɬ ɤ ɪɨɫɬɭ ɬɨɤɚ ɗ-Ʉ.
ɉɨɥɟɜɨɣ ɬɪɚɧɡɢɫɬɨɪ ɫ ɤɚɧɚɥɨɦ n-ɬɢɩɚ ɫɨɫɬɨɢɬ ɢɡ ɞɜɭɯ ɪɚɡɧɨɬɢɩɧɨɥɟɝɢɪɨɜɚɧɧɵɯ ɩɨɥɭɩɪɨɜɨɞɧɢɤɨɜ ɢ ɦɟɬɚɥɥɢɱɟɫɤɢɯ ɤɨɧɬɚɤɬɨɜ ɤ ɧɢɦ (n — ɤɚɧɚɥ n-ɬɢɩɚ, p — ɨɛɥɚɫɬɶ ɩɨɥɭɩɪɨɜɨɞɧɢɤɚ p-ɬɢɩɚ, ɂ - ɢɫɬɨɤ, ɋ -ɫɬɨɤ, Ɂ – ɡɚɬɜɨɪ).
ɉɪɢɧɰɢɩ ɞɟɣɫɬɜɢɹ: ɩɨɞɚɱɚ ɪɚɡɧɨɫɬɢ ɩɨɬɟɧɰɢɚɥɨɜ ɦɟɠɞɭ Ɂɚɬɜɨɪɨɦ ɢɋɬɨɤɨɦ ɩɪɢɜɨɞɢɬ ɤ ɢɡɦɟɧɟɧɢɸ ɪɚɡɦɟɪɚ ɨɛɥɚɫɬɢ ɩɪɨɫɬɪɚɧɫɬɜɟɧɧɨɝɨɡɚɪɹɞɚ ɩɟɪɟɯɨɞɚ Ɂɚɬɜɨɪ-ɤɚɧɚɥ. ɉɪɢ ɷɬɨɦ ɢɡɦɟɧɹɟɬɫɹ ɫɟɱɟɧɢɟɩɪɨɜɨɞɹɳɟɝɨ ɤɚɧɚɥɚ ɞɥɹ ɧɨɫɢɬɟɥɟɣ ɡɚɪɹɞɚ, ɫɨɨɬɜɟɬɫɬɜɟɧɧɨ, ɢɡɦɟɧɹɟɬɫɹ ɩɪɨɜɨɞɢɦɨɫɬɶ ɤɚɧɚɥɚ.
ɉɨɥɟɜɨɣ ɬɪɚɧɡɢɫɬɨɪ ɫ ɢɡɨɥɢɪɨɜɚɧɧɵɦ ɡɚɬɜɨɪɨɦ ɜɵɩɨɥɧɟɧ ɜ ɜɢɞɟɫɬɪɭɤɬɭɪɵ ɦɟɬɚɥɥ-ɞɢɷɥɟɤɬɪɢɤ-ɩɨɥɭɩɪɨɜɨɞɧɢɤ (ɆȾɉ).
ɗɮɮɟɤɬɢɜɧɨɫɬɶ ɪɚɛɨɬɵ ɭɜɟɥɢɱɢɜɚɟɬɫɹ ɫ ɭɦɟɧɶɲɟɧɢɟɦ ɬɨɥɳɢɧɵɞɢɷɥɟɤɬɪɢɱɟɫɤɨɝɨ ɫɥɨɹ.
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ɗɥɟɤɬɪɨɧɧɨ-ɦɢɤɪɨɫɤɨɩɢɱɟɫɤɢɟ ɢɡɨɛɪɚɠɟɧɢɹ ɩɨɩɟɪɟɱɧɨɝɨ ɫɟɱɟɧɢɹ ɩɨɥɟɜɨɝɨ ɬɪɚɧɡɢɫɬɨɪɚ(ɫɥɟɜɚ), ɜɵɩɨɥɧɟɧɧɨɝɨ ɩɨ 90 ɧɦ ɬɟɯɧɨɥɨɝɢɢ (2004 ɝ.), ɢ ɜɢɪɭɫɚ ɝɪɢɩɩɚ (ɫɩɪɚɜɚ).
ɗɥɟɤɬɪɨɧɧɨ-ɦɢɤɪɨɫɤɨɩɢɱɟɫɤɢɟɢɡɨɛɪɚɠɟɧɢɹ ɧɚ ɝɪɚɧɢɰɟɪɚɡɞɟɥɚ ɡɚɬɜɨɪ-ɞɢɷɥɟɤɬɪɢɤ-ɩɨɥɭɩɪɨɜɨɞɧɢɤ.
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ɦɟɬɚɥɥ ɦɟɬɚɥɥɞɢɷɥɟɤɬɪɢɤ
ȿ
ɯ
e
ȼ ɩɪɨɜɨɞɧɢɤɟɫɦɟɳɟɧɢɟ ɡɚɪɹɞɚ ɩɨɞɞɟɣɫɬɜɢɟɦ ɜɧɟɲɧɟɝɨɩɨɥɹ ɧɟɩɪɟɪɵɜɧɨ.
ɉɨɞ ɞɟɣɫɬɜɢɟɦ ɜɧɟɲɧɟɝɨɷɥɟɤɬɪɢɱɟɫɤɨɝɨ ɩɨɥɹ(ɩɪɢɥɨɠɟɧɧɨɝɨ ɧɚɩɪɹɠɟɧɢɹ) ɷɥɟɤɬɪɨɧ ɦɨɠɟɬ ɬɭɧɧɟɥɢɪɨɜɚɬɶɱɟɪɟɡ ɬɨɧɤɢɣ ɫɥɨɣ ɞɢɷɥɟɤɬɪɢɤɚ.
Ɍɭɧɧɟɥɢɪɨɜɚɧɢɟɷɥɟɤɬɪɨɧɨɜ ɩɪɨɢɫɯɨɞɢɬɞɢɫɤɪɟɬɧɨ ɩɪɢɩɨɫɬɨɹɧɧɨɦɩɪɢɥɨɠɟɧɧɨɦɧɚɩɪɹɠɟɧɢɢ.
ɗɧɟɪɝɢɹ ɤɨɧɞɟɧɫɚɬɨɪɚ – E=Q2/2C
Ɇɢɧɢɦɚɥɶɧɨɟ ɢɡɦɟɧɟɧɢɟ - ∆E=e2/2C
Ⱦɥɹ ɪɟɝɢɫɬɪɚɰɢɢ ɨɫɰɢɥɥɹɰɢɣ ɡɚɪɹɞɚ (ɬɨɤɚ) ɧɟɨɛɯɨɞɢɦɨ,
ɱɬɨɛɵ ∆E>>kT ɢɥɢ C<<e2/2kT≈2×10-16Ɏ (Ɍ=4,2Ʉ); ≈10-17Ɏ (Ɍ=77Ʉ); ≈3×10-18Ɏ (Ɍ=300Ʉ).
C ~ S/d - Ⱦɨɫɬɢɠɟɧɢɟ ɬɪɟɛɭɟɦɵɯ ɡɧɚɱɟɧɢɣ ɟɦɤɨɫɬɢɜɨɡɦɨɠɧɨ ɩɪɢ ɪɚɡɦɟɪɚɯ ~ 1ɧɦ ɩɪɢ Ɍ=300Ʉ.
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[Ʌɚɛɨɪɚɬɨɪɢɹ Ʉɪɢɨɷɥɟɤɬɪɨɧɢɤɢ, 2008ɝ (ɫ)]
Ɉɞɧɨɷɥɟɤɬɪɨɧɧɵɣ ɬɪɚɧɡɢɫɬɨɪ ɫɨɫɬɨɢɬ ɢɡ ɤɜɚɧɬɨɜɨɣ ɬɨɱɤɢ (ɜɜɢɞɟ ɦɨɥɟɤɭɥɵ ɢɥɢ ɤɥɚɫɬɟɪɚ ɩɪɨɜɨɞɹɳɟɝɨ ɦɚɬɟɪɢɚɥɚ) ɢɬɪɟɯ ɷɥɟɤɬɪɨɞɨɜ, ɢɦɟɸɳɢɯ ɧɚɧɨɦɟɬɪɨɜɵɟ ɪɚɡɦɟɪɵ.
ɉɪɢɧɰɢɩ ɞɟɣɫɬɜɢɹ: ɭɦɟɧɶɲɟɧɢɟ ɩɨɬɟɧɰɢɚɥɚ ɭɩɪɚɜɥɹɸɳɟɝɨɷɥɟɤɬɪɨɞɚ (ɡɚɬɜɨɪɚ) ɩɪɢɜɨɞɢɬ ɤ ɩɨɹɜɥɟɧɢɸ ɩɪɨɜɨɞɢɦɨɫɬɢɦɟɠɞɭ ɞɜɭɦɹ ɞɪɭɝɢɦɢ ɷɥɟɤɬɪɨɞɚɦɢ.
Ɉɞɧɨɷɥɟɤɬɪɨɧɧɵɣɬɪɚɧɡɢɫɬɨɪ, ɢɡɝɨɬɨɜɥɟɧɧɵɣ ɫɢɫɩɨɥɶɡɨɜɚɧɢɟɦɥɢɬɨɝɪɚɮɢɱɟɫɤɨɣɬɟɯɧɢɤɢ.
Ⱦɥɹ ɧɚɝɥɹɞɧɨɫɬɢɪɚɡɥɢɱɧɵɟɮɭɧɤɰɢɨɧɚɥɶɧɵɟɷɥɟɦɟɧɬɵ ɨɤɪɚɲɟɧɵɪɚɡɧɵɦɢ ɰɜɟɬɚɦɢ.
![Page 22: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/22.jpg)
ɗɥɟɤɬɪɨɦɟɯɚɧɢɱɟɫɤɢɟ ɫɢɫɬɟɦɵ – ɩɪɟɨɛɪɚɡɨɜɚɧɢɟ ɷɧɟɪɝɢɢ ɷɥɟɤɬɪɢɱɟɫɤɨɝɨɬɨɤɚ ɜ ɦɟɯɚɧɢɱɟɫɤɨɟ ɞɜɢɠɟɧɢɟ
Ɇɚɤɪɨ ɢ Ɇɟɝɚ
Ɇɢɤɪɨ ɢ ɇɚɧɨ
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ȿɦɤɨɫɬɧɵɟ ɫɢɫɬɟɦɵ ɥɢɧɟɣɧɨɝɨ ɫɞɜɢɝɚ (ɆɗɆɋ –ɦɢɤɪɨɷɥɟɤɬɪɨɦɟɯɚɧɢɱɟɫɤɢɟ ɫɢɫɬɟɦɵ)
ɂɡɨɛɪɚɠɟɧɢɟ ɢ ɫɯɟɦɚɷɥɟɦɟɧɬɨɜ ɆɗɆɋ, ɪɚɛɨɬɚɸɳɢɯ ɧɚɟɦɤɨɫɬɧɨɦ ɩɪɢɧɰɢɩɟ.
x
UxFp ∂
∂−=)(
ɋɢɥɚ ɩɪɢɬɹɠɟɧɢɹɦɟɠɞɭ ɩɚɪɚɥɥɟɥɶɧɵɦɢɩɥɚɫɬɢɧɚɦɢɤɨɧɞɟɧɫɚɬɨɪɚ:
ɝɞɟ U – ɷɧɟɪɝɢɹ, ɡɚɩɚɫɟɧɧɚɹɜ ɤɨɧɞɟɧɫɚɬɨɪɟ.
∫=v
udvU , ɝɞɟ u – ɩɥɨɬɧɨɫɬɶ ɷɧɟɪɝɢɢ: 202
1Eu rεε= , ɝɞɟ ε0 – ɞɢɷɥɟɤɬɪɢɱɟɫɤɚɹ
ɩɪɨɧɢɰɚɟɦɨɫɬɶ ɜɚɤɭɭɦɚ, εr – ɞɢɷɥɟɤɬɪɢɱɟɫɤɚɹ ɩɪɨɧɢɰɚɟɦɨɫɬɶ ɫɪɟɞɵ ɢ ȿ – ɷɥ. ɩɨɥɟ.
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ɉɥɨɳɚɞɶ ɩɥɚɫɬɢɧ – Ⱥɪ, ɬɨɝɞɚ dv = Apdx.
Ap = blp; E = V/(d – x); x – ɫɦɟɳɟɧɢɟ; εr = 1
pp blxd
VxF ⎥
⎦
⎤⎢⎣
⎡−
=2
2
0 )(2
1)( ε
⎥⎦
⎤⎢⎣
⎡−
==2
2
0 )(2
1)()(
xd
V
bl
xFx
p
pp εσɍɫɢɥɢɟ ɧɚ ɟɞɢɧɢɰɭ ɩɥɨɳɚɞɢ:
As = Ls2 – ɨɛɳɚɹ ɩɥɨɳɚɞɶ, ɡɚɧɹɬɚɹ
ɤɨɧɞɟɧɫɚɬɨɪɚɦɢ ɩɥɨɳɚɞɶɸ Ap = blp.
Ʉɨɥɢɱɟɫɬɜɨ ɤɨɧɞɟɧɫɚɬɨɪɨɜ ɧɚ ɷɬɨɣɩɥɨɳɚɞɢ: N= Ls
2/[(lp+2a)(a+2d)], ɝɞɟ ɚ– ɲɢɪɢɧɚ ɩɥɚɫɬɢɧɵ, 2ɚ – ɪɚɫɫɬɨɹɧɢɟɦɟɠɞɭ ɩɥɚɫɬɢɧɚɦɢ ɧɚ ɨɛɤɥɚɞɤɟ, ɚ+2d – ɡɚɡɨɪ ɦɟɠɞɭ ɩɥɚɫɬɢɧɚɦɢɨɛɤɥɚɞɨɤ.
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⎥⎥⎦
⎤
⎢⎢⎣
⎡
++×⎥
⎦
⎤⎢⎣
⎡−
=)2)(2(
)(
)(2
1)(
2
2
2
0 daal
blL
xd
VxF
p
pSTotal ε
Ⱦɥɹ lp>>(2a) ɢ d=a: ⎥⎦
⎤⎢⎣
⎡×⎥
⎦
⎤⎢⎣
⎡−
=3
2
2
2
0 )/1(6
1)(
a
bL
ax
VxF S
Total ε
FTotal(x) ~ ba-3 : ɚ – ɨɩɪɟɞɟɥɹɟɬɫɹɢɫɩɨɥɶɡɭɟɦɨɣ ɬɟɯɧɨɥɨɝɢɟɣ ɥɢɬɨɝɪɚɮɢɢ; b – ɬɟɯɧɨɥɨɝɢɟɣ ɬɪɚɜɥɟɧɢɹ.
Ⱦɥɹ ɞɨɫɬɢɠɟɧɢɹ ɛɨɥɶɲɢɯ ɫɢɥ ɩɪɢɫɨɯɪɚɧɟɧɢɢ ɞɨɫɬɚɬɨɱɧɨɣ ɠɟɫɬɤɨɫɬɢɧɟɨɛɯɨɞɢɦɨ ɨɛɟɫɩɟɱɢɬɶ ɜɵɫɨɤɨɟɫɨɨɬɧɨɲɟɧɢɟ ɪɚɡɦɟɪɨɜ b/a (ɚɫɩɟɤɬɧɨɟɨɬɧɨɲɟɧɢɟ).
ɍɜɟɥɢɱɟɧɢɟ ɫɢɥɵ ɜɨɡɦɨɠɧɨ ɡɚ ɫɱɟɬɢɫɩɨɥɶɡɨɜɚɧɢɹ ɩɨɤɪɵɬɢɣ ɫ εr>>1
(ɧɚɩɪɢɦɟɪ Si3N4 – ɧɢɬɪɢɞ ɤɪɟɦɧɢɹ)
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ȿɦɤɨɫɬɧɵɟ ɫɢɫɬɟɦɵ ɩɨɜɨɪɨɬɚȼɪɚɳɟɧɢɟ ɩɪɨɢɫɯɨɞɢɬ ɡɚ ɫɱɟɬ ɫɢɥ ɟɦɤɨɫɬɧɨɝɨɩɪɨɢɫɯɨɠɞɟɧɢɹ Fp(z).
ɍɝɨɥ ɩɨɜɨɪɨɬɚ – φ (ɪɚɞ)~[Fp(z)/kφ]LC ,
ɚ ɫɦɟɳɟɧɢɟ - z=φLC~[Fp(z)/kφ]LC2.
Ʉɨɷɮɮɢɰɢɟɧɬ ɞɟɮɨɪɦɚɰɢɢ ɞɥɹ ɢɡɝɢɛɨɜ (ɇ/ɪɚɞ):
Kφ=βG[(a3b)/LT],
ɝɞɟ G – ɦɨɞɭɥɶ ɫɞɜɢɝɨɜɨɣ ɠɟɫɬɤɨɫɬɢ (ɦɨɞɭɥɶɘɧɝɚ) (~ 80 Ƚɉɚ ɞɥɹ ɦɨɧɨɤɪɢɫɬɚɥɥɢɱɟɫɤɨɝɨɤɪɟɦɧɢɹ); b – ɜɵɫɨɬɚ; a – ɲɢɪɢɧɚ ɛɚɥɤɢ; LT –
ɞɥɢɧɚ ɩɨɜɨɪɨɬɧɨɣ ɨɫɢ; β - ɤɨɧɫɬɚɧɬɚ, ɡɚɜɢɫɹɳɚɹɨɬ ɨɬɧɨɲɟɧɢɹ b/a (ɞɥɹ b/a>10 β=1/3).
ɨɫɧɨɜɚɧɢɟ (Si)
![Page 27: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/27.jpg)
ȿɦɤɨɫɬɧɵɟ ɫɢɫɬɟɦɵ ɩɨɜɨɪɨɬɚ
z=φLC~[Fp(z)//kφ]LC2
LT = 58 ɦɤɦ
a = 1 ɦɤɦ
b = 6 ɦɤɦ
Lɋ = 50 ɦɤɦ
lp = 20 ɦɤɦ
d = 2 ɦɤɦ
β = 1/3
Kφ = 5.5 ×10-9 ɇ/ɪɚɞ
z = [V2/33] ɧɦ/ȼ2
Ⱦɥɹ V = 40 ȼ ɢ Ls2 = 100×100 ɦɤɦ
z = 48 ɧɦ
![Page 28: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/28.jpg)
ȿɦɤɨɫɬɧɵɟ ɫɢɫɬɟɦɵ ɩɨɜɨɪɨɬɚ
Ɉɫɶɜɪɚɳɟɧɢɹ
ɥɨɩɚɬɤɚ
ɝɪɟɛɟɧɤɚ
ɂɡɨɛɪɚɠɟɧɢɟ ɜ ɫɟɱɟɧɢɢ Ⱥ-Ⱥ
ɇɚɩɪɚɜɥɟɧɢɟɫɢɥɵ
ɊɗɆ ɢɡɨɛɪɚɠɟɧɢɟ ɢ ɫɯɟɦɚɫɢɫɬɟɦɵ ɩɨɜɨɪɨɬɚ.
![Page 29: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/29.jpg)
x
UxFp ∂
∂−=)( ∫=
v
udvU 202
1Eu rεε=
φ
)])4/((2[ 22 φφ pp lbbldv −−∂≈∂
[ ]))4/((22
222
20 φφε
pp
v
lbbldd
VU −−∂⎟⎟
⎠
⎞⎜⎜⎝
⎛= ∫
Ɇɨɦɟɧɬ ɫɢɥ ɜɪɚɳɟɧɢɹ Ɍ:
[ ] pp Nlba
VUT 22
2
0 )4/(2
1+⎟⎟
⎠
⎞⎜⎜⎝
⎛≈
∂∂
−= εφ
⎟⎟⎠
⎞⎜⎜⎝
⎛
++=
)22)(2(
2
daal
LN
p
SpɄɨɥɢɱɟɫɬɜɨ ɦɨɞɭɥɟɣ ɜ ɨɛɥɚɫɬɢ LS
2
![Page 30: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/30.jpg)
[ ] φβφεφ φ
⎭⎬⎫
⎩⎨⎧
==+⎟⎟⎠
⎞⎜⎜⎝
⎛≈
∂∂
−=T
pp L
baGKNlb
a
VUT
322
2
0 )4/(2
1
⎟⎟⎠
⎞⎜⎜⎝
⎛⎟⎟⎠
⎞⎜⎜⎝
⎛=
ba
LLl
G
Vrad rSp
5
2*20
8)(
βεφ
[ ] 1;)2/(1;; 2* ⟨⟨+=⟩⟩= φpppp lbllalad
5−∝ aφɍɦɟɧɶɲɟɧɢɟ ɪɚɡɦɟɪɨɜ ɷɥɟɦɟɧɬɨɜ ɩɨɡɜɨɥɹɟɬ ɭɜɟɥɢɱɢɬɶ ɭɝɨɥ ɩɨɜɨɪɨɬɚ ɩɪɢ
ɨɞɧɨɜɪɟɦɟɧɧɨɦ ɭɦɟɧɶɲɟɧɢɢ ɝɚɛɚɪɢɬɨɜ ɭɫɬɪɨɣɫɬɜɚ.
![Page 31: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/31.jpg)
⎟⎟⎠
⎞⎜⎜⎝
⎛=⎟⎟
⎠
⎞⎜⎜⎝
⎛⎟⎟⎠
⎞⎜⎜⎝
⎛±=±≈
358
2
5
2*20 V
ba
LLLl
G
VLz CTSp
C βεφ
⎟⎟⎠
⎞⎜⎜⎝
⎛=⎟⎟
⎠
⎞⎜⎜⎝
⎛⎟⎟⎠
⎞⎜⎜⎝
⎛±=±≈ −
ba
LLV
ba
LL
G
VLz CSCS
C 5
4214
5
420 )10(
32βεφ
ɂɡɨɛɪɚɠɟɧɢɟ ɫɢɫɬɟɦɵ ɢɡ 4-ɯ ɡɨɧɞɨɜ ɧɚɜɪɚɳɚɸɳɢɯɫɹ ɩɨɞɜɟɫɤɚɯ.
LT=20 ɦɤɦ; LC=lp=23 ɦɤɦ; LS=50ɦɤɦ; ɚ=1 ɦɤɦ; b=46 ɦɤɦ; β = 1/3; Kφ = 1,2×10-7 ɇ/ɪɚɞ; z/LC<<1;
φ<<1:
[z]=[ɧɦ/ȼ2]
ɉɪɟɞɩɨɥɨɠɢɦ, ɱɬɨ lp*=lp; LC=LT=lp; LS=2lp;
z/LC<<1, ɬɨɝɞɚ:
⎟⎟⎠
⎞⎜⎜⎝
⎛∝
5
4
a
LLz CS
![Page 32: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/32.jpg)
Ɋɟɡɨɧɚɧɫɧɵɟ ɱɚɫɬɨɬɵ
⎟⎠⎞
⎜⎝⎛
⎟⎟⎠
⎞⎜⎜⎝
⎛∝⎟
⎠⎞
⎜⎝⎛=
2
2/12/1
0 2
1
l
bE
m
kf
ρπ
⎥⎦
⎤⎢⎣
⎡×⎥
⎦
⎤⎢⎣
⎡−
=3
2
2
2
0 )/1(6
1)(
a
bL
ax
VxF S
Total ε
E – ɦɨɞɭɥɶ ɭɩɪɭɝɨɫɬɢ; ρ - ɩɥɨɬɧɨɫɬɶɦɚɬɟɪɢɚɥɚ; b ɢ l – ɜɵɫɨɬɚ ɢ ɞɥɢɧɚɛɚɥɤɢ, ɫɨɨɬɜɟɬɫɬɜɟɧɧɨ
kx=200 ɇ/ɦ; x=lp=25 ɦɤɦ: F=kx=5 ɦɇ
ɉɪɢ a = 1 ɦɤɦ; b = 50 ɦɤɦ; V = 40 ȼ: ɞɥɹ ɩɨɥɭɱɟɧɢɹ ɬɚɤɨɣ ɠɟ ɫɢɥɵ ɜ 5 ɦɇɬɪɟɛɭɟɬɫɹ ɢɫɩɨɥɶɡɨɜɚɬɶ ɫɢɫɬɟɦɭ ɪɚɡɦɟɪɨɦ LS
2=1,25×10-6 ɦ2
371025,110502300
200
2
1
2
12/1
66
2/1
0 =⎟⎠⎞
⎜⎝⎛
⋅⋅⋅⋅=⎟
⎠⎞
⎜⎝⎛= −−ππ m
kf ɤȽɰ
![Page 33: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/33.jpg)
ɜɨɡɜɪɚɳɚɸɳɚɹɩɪɭɠɢɧɚ
ɨɫɧɨɜɚɧɢɟ
ɂɡɨɛɪɚɠɟɧɢɟ ɢ ɫɯɟɦɚɦɢɤɪɨɦɟɯɚɧɢɱɟɫɤɨɝɨɭɫɬɪɨɣɫɬɜɚ ɫ ɩɟɪɟɫɬɪɚɢɜɚɟɦɨɣɪɟɡɨɧɚɧɫɧɨɣ ɱɚɫɬɨɬɨɣ (Vtune)
![Page 34: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/34.jpg)
ɇɚɧɨ-ɦɚɧɢɩɭɥɹɬɨɪɵ ɢ ɦɢɤɪɨɪɨɛɨɬɵɋɯɟɦɚ ɦɚɧɢɩɭɥɹɬɨɪɚ, ɫɨɫɬɨɹɳɟɝɨɢɡ ɞɜɭɯ ɜɪɚɳɚɸɳɢɯɫɹ ɷɥɟɦɟɧɬɨɜɤɚɠɞɵɣ: ɫɥɟɜɚ ɢɫɯɨɞɧɨɟɩɨɥɨɠɟɧɢɟ – ɭɩɪɚɜɥɹɸɳɟɟɧɚɩɪɹɠɟɧɢɟ 0; ɫɩɪɚɜɚ – ɩɨɞɚɧɨɧɚɩɪɹɠɟɧɢɟ, ɢɡɦɟɧɹɸɳɟɟɩɨɥɨɠɟɧɢɟ ɡɨɧɞɨɜ.
ɋɯɟɦɚɬɢɱɟɫɤɨɟ ɢɡɨɛɪɚɠɟɧɢɟɦɚɧɢɩɭɥɹɬɨɪɚ ɫ ɭɤɚɡɚɧɢɟɦɢɦɟɸɳɢɯɫɹ ɫɬɟɩɟɧɟɣ ɫɜɨɛɨɞɵ
![Page 35: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/35.jpg)
Ɇɭɥɶɬɢɦɟɞɢɣɧɵɟ ɩɪɨɟɤɬɨɪɵ ɧɚ ɨɫɧɨɜɟ ɆɗɆɋ
![Page 36: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/36.jpg)
ɉɪɢɦɟɧɟɧɢɹ ɆɗɆɋ- ɂɧɟɪɰɢɨɧɧɵɟ ɢɡɦɟɪɢɬɟɥɢ: ɚɤɫɟɥɨɦɟɬɪɵ, ɝɢɪɨɫɤɨɩɵ, ɢɡɦɟɪɢɬɟɥɢ ɱɚɫɬɨɬɵɜɪɚɳɟɧɢɹ, ɞɚɬɱɢɤɢ ɜɢɛɪɚɰɢɣ
- ɂɡɦɟɪɢɬɟɥɢ ɞɚɜɥɟɧɢɹ: ɞɚɬɱɢɤɢ ɞɚɜɥɟɧɢɹ ɜ ɲɢɧɚɯ; ɢɡɦɟɪɢɬɟɥɢ ɞɚɜɥɟɧɢɹ ɤɪɨɜɢ ɢɞɪ.
- Ⱦɢɫɩɥɟɢ: ɨɩɬɢɱɟɫɤɢɟ ɷɥɟɦɟɧɬɵ ɜ ɩɪɨɟɤɬɨɪɚɯ
- Ɍɟɥɟɤɨɦɦɭɧɢɤɚɰɢɢ: ɧɚɫɬɪɚɢɜɚɟɦɵɟ ɮɢɥɶɬɪɵ, ɩɟɪɟɤɥɸɱɚɬɟɥɢ, ɪɟɝɭɥɹɬɨɪɵ ɮɚɡ, ɩɚɫɫɢɜɧɵɟ ɷɥɟɦɟɧɬɵ (ɟɦɤɨɫɬɢ, ɢɧɞɭɤɬɢɜɧɨɫɬɢ);
- ɏɢɦɢɱɟɫɤɢɟ ɢ ɛɢɨɥɨɝɢɱɟɫɤɢɟ ɢɡɦɟɪɟɧɢɹ: ɢɡɦɟɪɢɬɟɥɢ ɦɢɤɪɨɩɨɬɨɤɨɜ, ɦɚɧɢɩɭɥɹɰɢɢɫ ȾɇɄ, ɦɢɤɪɨɧɚɫɨɫɵ, ɞɟɬɟɤɬɨɪɵ
ȼ 1950 Ɋ. Ɏɟɣɦɚɧ ɨɛɴɹɜɢɥ ɨ ɩɪɟɦɢɢ ɜ 1000$ ɬɨɦɭ, ɤɬɨ ɩɟɪɜɵɣ ɫɞɟɥɚɟɬ ɷɥɟɤɬɪɨɦɨɬɨɪ ɪɚɡɦɟɪɨɦ ɦɟɧɟɟ 1/64 ɞɸɣɦɚ (~0,5 ɦɦ). Ɍɚɤɨɣ ɦɨɬɨɪ ɛɵɥ ɫɞɟɥɚɧ (ɢ ɩɪɟɦɢɹ ɛɵɥɚ ɜɵɩɥɚɱɟɧɚ) ɍ. Ɇɚɤɥɢɥɚɧɨɦ ɜɪɭɱɧɭɸ ɫɢɫɩɨɥɶɡɨɜɚɧɢɟɦ ɩɢɧɰɟɬɨɜ ɢ ɨɩɬɢɱɟɫɤɨɝɨ ɦɢɤɪɨɫɤɨɩɚ.
ȼ 1980 ɛɵɥɚ ɪɚɡɪɚɛɨɬɚɧɚ ɬɟɯɧɨɥɨɝɢɹ ɦɚɫɫɨɜɨɝɨ ɩɪɨɢɡɜɨɞɫɬɜɚ ɷɥɟɤɬɪɨɦɨɬɨɪɨɜ (ɆɗɆɋ) ɪɚɡɦɟɪɨɦ 1/100 ɨɬɦɨɬɨɪɚ Ɇɚɤɥɢɥɚɧɚ.
![Page 37: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/37.jpg)
ɍɝɥɟɪɨɞɧɵɟ ɧɚɧɨɬɪɭɛɤɢ ɞɥɹ ɧɚɧɨɭɫɬɪɨɣɫɬɜ
http://www.photon.t.u-tokyo.ac.jp/~maruyama/nanotube/nanotube.html
![Page 38: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/38.jpg)
http://www.me.vt.edu/nrylander/home/home.html
http://www.csc.com
Ƚɟɬɟɪɨɩɟɪɟɯɨɞɵ ɜ ɧɚɧɨɬɪɭɛɤɚɯ
Phys. Rev. Lett. 79, 4453 (1997).
ɉɪɢ ɤɨɧɬɚɤɬɟ ɧɚɧɨɬɪɭɛɨɤ ɫ ɪɚɡɥɢɱɧɵɦ ɬɢɩɨɦ ɩɪɨɜɨɞɢɦɨɫɬɢɜɨɡɧɢɤɚɸɬ p-n ɩɟɪɟɯɨɞɵ, ɧɚ ɨɫɧɨɜɟ ɤɨɬɨɪɵɯ ɜɨɡɦɨɠɧɨɩɨɫɬɪɨɟɧɢɟ ɞɢɨɞɧɵɯ ɢ ɬɪɢɨɞɧɵɯ ɫɬɪɭɤɬɭɪ.
![Page 39: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/39.jpg)
ɗɥɟɤɬɪɨɦɟɯɚɧɢɱɟɫɤɢɟ ɭɫɬɪɨɣɫɬɜɚ ɧɚ ɨɫɧɨɜɟ ɭɝɥɟɪɨɞɧɵɯ ɧɚɧɨɬɪɭɛɨɤ
ȼɡɚɢɦɨɞɟɣɫɬɜɢɟ ɚɬɨɦɧɵɯ ɫɥɨɟɜ, ɫɨɫɬɚɜɥɹɸɳɢɯ ɭɝɥɟɪɨɞɧɵɟɧɚɧɨɬɪɭɛɤɢ, ɨɱɟɧɶ ɫɥɚɛɨɟ. ɗɬɨɨɡɧɚɱɚɟɬ ɬɚɤɠɟ, ɱɬɨ ɬɪɟɧɢɟ ɩɪɢ ɢɯɜɡɚɢɦɧɨɦ ɞɜɢɠɟɧɢɢ ɬɨɠɟ ɫɥɚɛɨɟ. ɗɬɨ ɨɛɫɬɨɹɬɟɥɶɫɬɜɨ ɦɨɠɟɬ ɛɵɬɶɢɫɩɨɥɶɡɨɜɚɧɨ ɞɥɹ ɫɨɡɞɚɧɢɹɦɟɯɚɧɢɱɟɫɤɢɯ ɭɫɬɪɨɣɫɬɜ.
http://www.physics.berkeley.edu/research/zettl/projects/NEMS.html
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ɗɥɟɤɬɪɨɦɟɯɚɧɢɱɟɫɤɢɟ ɭɫɬɪɨɣɫɬɜɚ ɧɚ ɨɫɧɨɜɟ ɭɝɥɟɪɨɞɧɵɯ ɧɚɧɨɬɪɭɛɨɤ
http://www.physics.berkeley.edu/research/zettl/projects/NEMS.html
![Page 41: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/41.jpg)
ɋɯɟɦɚɬɢɱɟɫɤɨɟɩɪɟɞɫɬɚɜɥɟɧɢɟ ɢɷɥɟɤɬɪɨɧɧɨ-ɦɢɤɪɨɫɤɨɩɢɱɟɫɤɨɟɢɡɨɛɪɚɠɟɧɢɟ ɞɜɢɠɟɧɢɹɜɧɭɬɪɟɧɧɢɯ ɱɚɫɬɟɣɧɚɧɨɬɪɭɛɨɤ.
Ʌɢɧɟɣɧɨɟ ɩɟɪɟɦɟɳɟɧɢɟ ɧɚɧɨɬɪɭɛɨɤ
ɋɯɟɦɚɬɢɱɟɫɤɨɟ ɩɪɟɞɫɬɚɜɥɟɧɢɟ ɢ ɷɥɟɤɬɪɨɧɧɨ-ɦɢɤɪɨɫɤɨɩɢɱɟɫɤɨɟ ɧɚɛɥɸɞɟɧɢɟ ɡɚ «ɬɟɥɟɫɤɨɩɢɱɟɫɤɢɦ»ɩɨɜɟɞɟɧɢɟɦ ɧɚɧɨɬɪɭɛɨɤ.
![Page 42: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/42.jpg)
Ɋɟɨɫɬɚɬ ɧɚ ɨɫɧɨɜɟ ɦɧɨɝɨɫɬɟɧɧɨɣ ɭɝɥɟɪɨɞɧɨɣ ɧɚɧɨɬɪɭɛɤɢ
![Page 43: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/43.jpg)
Ɇɚɫɫɢɜɵ ɦɧɨɝɨɫɥɨɣɧɵɯ ɭɝɥɟɪɨɞɧɵɯ ɧɚɧɨɬɪɭɛɨɤ
ȽɎɏɈ
![Page 44: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/44.jpg)
[Science 20 March 2009:Vol. 323. no. 5921, pp. 1575 – 1578]
ɂɫɤɭɫɫɬɜɟɧɧɵɟ ɦɭɫɤɭɥɵ ɢɡ ɧɚɧɨɬɪɭɛɨɤ
![Page 45: ぱÜÖ í½ Ööí¿áÖ ÜïÖÜç ÖíÖÜö êÖÜ¿ÜÇóúnano.msu.ru/files/basics/lecture11_Obraztsov.pdf · γ 10 とëóöóô ï¡óçí¢Ö ½äíëí½ öëܽ¿óöÜÇëíâóô](https://reader031.fdocumentos.tips/reader031/viewer/2022012916/602f983f61a0144d451e871d/html5/thumbnails/45.jpg)
ɇɚɧɨɬɟɪɦɨɦɟɬɪ ɢɡ ɧɚɧɨɬɪɭɛɨɤ
Nature 415, 599 (2002)
58°ɋ 490°ɋ 45°ɋ
75 ɧɦ
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Ɇɟɝɚ-ɭɫɬɪɨɣɫɬɜɨ ɧɚ ɨɫɧɨɜɟ ɧɚɧɨ-ɬɪɭɛɨɤ: ɤɨɫɦɢɱɟɫɤɢɣ ɥɢɮɬ
NanoNews.com
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ȼ ɪɟɡɭɥɶɬɚɬɟ ɷɜɨɥɸɰɢɨɧɧɨɝɨ ɪɚɡɜɢɬɢɹ ɥɢɬɨɝɪɚɮɢɱɟɫɤɨɣ ɬɟɯɧɢɤɢɫɨɜɪɟɦɟɧɧɚɹ ɩɪɨɦɵɲɥɟɧɧɨɫɬɶ ɫɩɨɫɨɛɧɚ ɤ ɦɚɫɫɨɜɨɦɭ ɩɪɨɢɡɜɨɞɫɬɜɭɷɥɟɤɬɪɨɧɧɵɯ ɢ ɷɥɟɤɬɪɨɦɟɯɚɧɢɱɟɫɤɢɯ ɭɫɬɪɨɣɫɬɜ ɧɚɧɨɦɟɬɪɨɜɨɝɨ ɪɚɡɦɟɪɚ, ɮɢɡɢɱɟɫɤɢɟ ɩɪɢɧɰɢɩɵ ɪɚɛɨɬɵ ɤɨɬɨɪɵɯ ɚɧɚɥɨɝɢɱɧɵ ɩɪɢɧɰɢɩɚɦ ɪɚɛɨɬɵɩɪɢɛɨɪɨɜ ɢ ɦɟɯɚɧɢɡɦɨɜ ɧɚ ɦɢɤɪɨ-, ɦɚɤɪɨ- ɢ ɦɟɝɚ-ɦɚɫɲɬɚɛɚɯ.
Ɏɭɧɤɰɢɨɧɢɪɨɜɚɧɢɟ ɧɚɧɨɭɫɬɪɨɣɫɬɜ ɢ ɧɚɧɨɫɢɫɬɟɦ, ɢɫɩɨɥɶɡɭɸɳɢɯɨɫɨɛɟɧɧɨɫɬɢ ɮɢɡɢɱɟɫɤɢɯ ɜɡɚɢɦɨɞɟɣɫɬɜɢɣ ɜ ɧɚɧɨɦɟɬɪɨɜɨɦ ɦɚɫɲɬɚɛɟ, ɬɪɟɛɭɟɬ ɫɨɡɞɚɧɢɹ ɨɫɨɛɵɯ ɭɫɥɨɜɢɣ.
Ɇɧɨɝɨɱɢɫɥɟɧɧɵɟ ɩɪɢɦɟɪɵ ɧɚɭɱɧɵɯ ɞɟɦɨɧɫɬɪɚɰɢɣ ɜɨɡɦɨɠɧɨɫɬɟɣ ɫɨɡɞɚɧɢɹɧɚɧɨɭɫɬɪɨɣɫɬɜ ɢ ɧɚɧɨɫɢɫɬɟɦ ɜɫɟ ɟɳɟ ɞɚɥɟɤɢ ɨɬ ɪɟɚɥɢɡɚɰɢɢ ɜ ɜɢɞɟɩɪɨɦɵɲɥɟɧɧɵɯ ɬɟɯɧɨɥɨɝɢɣ.